Introduction to the Job The Non-Product Metrology (NPM) group develops metrology capabilities that advance EUV source learning, support EUV power scaling, and meet the needs of product teams and internal Research stakeholders. The team enables comprehensive standalone EUV source qualification in San Diego by developing and owning internal EUV source metrology tools.
The Senior Electro-Optical Systems Engineer develops precision optical and electro-optical metrology systems used to measure, characterize, and support the control of light production in extreme ultraviolet (EUV) sources for next-generation photolithography equipment. These systems combine optical sensing, detectors, cameras, lasers, electronics, signal processing, optomechanics, thermal mechanics, mechatronics, automation, controls, and software.
This role owns one or more major metrology subsystems from requirements definition through design, procurement, assembly, integration, testing, verification, and release. The engineer provides technical leadership to cross-functional teams and suppliers while supporting product development, Research, manufacturing, system integration, and internal customer needs.
Role and responsibilities - Translate equipment, system, and stakeholder needs into metrology requirements, subsystem specifications, interface definitions, performance budgets, and verification plans.
- Lead the definition, development, and integration of optical and electro-optical metrology systems that enable EUV source learning, power scaling, stable operation, and improved system availability.
- Develop sensing systems involving lasers, illumination and imaging optics, detectors, cameras, fibers, filters, coatings, optomechanical assemblies, and signal-processing hardware.
- Develop specifications for light-emitting, light-delivery, and light-sensing modules in accordance with system-level and cross-functional requirements.
- Perform photon-budget, radiometric, and signal-to-noise ratio calculations that account for source output, optical transmission, detector response, background signal, electronic noise, and other system noise sources.
- Conduct optical performance, tolerancing, stray-light, beam-propagation, alignment, calibration, and image- or signal-quality analyses.
- Apply knowledge of optics, sensors, electronics, algorithms, software, and data analysis to improve metrology performance.
- Own metrology subsystems through component selection, supplier engagement, procurement, assembly, alignment, integration, testing, qualification, and release.
- Integrate optical hardware with low-voltage electronics, motors, analog sensors, precision mechanisms, controls, software, motion systems, and thermal-management hardware.
- Develop laboratory test benches, diagnostic tools, fixtures, calibration methods, test procedures, acceptance criteria, and automated data-analysis tools.
- Plan and execute laboratory and cleanroom testing for design validation and verification.
- Correlate analytical and numerical predictions with measured results and resolve performance gaps.
- Lead integration and troubleshooting activities to verify that metrology systems function as designed within the EUV light source.
- Lead root-cause investigations involving optical, electrical, mechanical, thermal, contamination, controls, software, and interface issues.
- Assess the feasibility of new measurement concepts and translate promising ideas into practical engineering solutions.
- Validate concepts through theoretical analysis, modeling, simulation, breadboard development, and experimental testing.
- Work with cross-functional teams to integrate core technologies into stable, reliable, automated, and cleanroom-compatible engineering solutions.
- Support design reviews, technical risk management, supplier coordination, manufacturing readiness, equipment qualification, and system escalations.
- Provide technical guidance to design engineers, project teams, suppliers, and internal customers throughout the product-development lifecycle.
- Communicate technical status, risks, issues, results, and next steps across engineering disciplines and management levels.
- Document requirements, architectures, design specifications, interfaces, analyses, procedures, verification results, and training materials.
- Perform other duties as assigned.
Education and experience Candidates should meet one of the following combinations of education and relevant experience:
- PhD with at least 4 years of relevant experience.
- Master's degree with at least 8 years of relevant experience.
- Bachelor's degree with at least 12 years of relevant experience.
A degree in optical engineering, photonics, physics, electrical engineering, mechanical engineering, systems engineering, biomedical engineering, imaging science, or a related technical field is preferred.
Required Qualifications - Experience developing optical, electro-optical, or metrology systems for semiconductor equipment, scientific instrumentation, aerospace, medical devices, or another precision-hardware industry.
- Demonstrated ownership of an optical system or major subsystem from requirements definition through assembly, integration, testing, and verification.
- Hands-on experience with optical alignment, laser systems, optical test equipment, sensors, detectors, cameras, or signal-detection systems.
- Experience with optical system design, tolerancing, alignment, calibration, and performance characterization.
- Experience performing photon-budget, radiometric, signal-chain, and signal-to-noise ratio calculations.
- Knowledge of lasers, optical sources, imaging and illumination systems, detectors, cameras, fibers, filters, coatings, and optomechanical components.
- Experience developing test methods, laboratory setups, calibration approaches, and data-analysis tools.
- Ability to troubleshoot failures in complex multidisciplinary systems using analytical models, experimental methods, and test data.
- Ability to develop and review theoretical models and validate concepts through analysis and breadboard testing.
- Ability to convert new technical concepts into practical engineering solutions.
- Experience documenting system requirements, designs, interfaces, test procedures, and verification results.
- Experience with data analysis and visualization using Python, MATLAB, LabVIEW, or equivalent tools.
- Effective written and verbal communication skills, including the ability to explain technical issues to engineers, scientists, management, suppliers, and internal customers.
- Ability to work independently while collaborating across optical, mechanical, electrical, controls, software, manufacturing, and supplier teams.
Skills Working at the cutting edge of technology requires solving new and complex problems through close collaboration. The successful candidate will work in a multidisciplinary environment with engineers, scientists, suppliers, and internal stakeholders.
To succeed in this role, the candidate should demonstrate:
- Strong theoretical and experimental knowledge of optical sensing, laser optics, imaging systems, detectors, electronics, and signal processing.
- System-level thinking and the ability to manage interfaces across multiple engineering disciplines.
- Technical ownership, sound engineering judgment, and a record of delivering complex hardware.
- Structured problem-solving and root-cause-analysis skills.
- Ability to balance analytical rigor with hands-on laboratory execution.
- Ability to define and execute work from project objectives with limited supervision.
- Ability to communicate technical status, risks, tradeoffs, and recommendations clearly.
- Proficiency with Microsoft Word, Excel, and PowerPoint.
The current base annual salary range for this role is currently:
$143,063-209,825
Pay scales are determined by role, level, location and alignment with market data. Individual pay is determined through interviews and an assessment of several factors that that are unique to each candidate, including but not limited to job-related skills, relevant education and experience, certifications, abilities of the candidate and pay relative to other team members.
The Company offers employees and their families, medical, dental, vision, and basic life insurance. Employees are able to participate in the Company's 401k plan. Employees will also receive eight (8) hours of vacation leave every month and (13) paid holidays throughout the calendar year. For more information, please contact the Recruiter or click on this link Compensation & Benefits in the US.
All new ASML jobs have a minimum application deadline of 10 days.
This position requires access to controlled technology, as defined in the United States Export Administration Regulations (15 C.F.R. 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.
Inclusion and diversityASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that inclusion and diversity is a driving force in the success of our company.
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